Thin Film Coating Process
Thin film coating processes by PVD and CVD have been indispensable technologies in many engineering fields.
In contrast, thick film processing has not been well developed despite various useful applications, such as thermal barrier, anticorrosion, and antiabrasive coatings.
Laser CVD has been traditionally employed to prepare small-scale deposits such as thin film or dots, whiskers, and nanotubes. Further, this technique cannot be applied to prepare thick and wide-area coating films.